MEMS inclinometers must undergo full-temperature testing, as temperature variation—not nonlinearity—constitutes their largest error source. The elastic modulus of sensitive materials, reference voltage, and amplifier gain all drift with temperature. Full-temperature testing allows these effects to be assessed and compensated, guaranteeing measurement accuracy over the full operating temperature range.
Taking the high-precision inclinometer T7000-F manufactured by Micro-Magic Inc as an example, during the full-temperature cycling test, the T7000-F is fixed at a non-zero angle (e.g., +10°) with its mechanical angle kept unchanged throughout the entire process. Starting from room temperature (25°C, ambient temperature), the temperature is decreased to -40°C and held for a sufficient duration. Then, at a set temperature change rate, the temperature is increased to +85°C and held again. Finally, optionally, the temperature may be returned to room temperature. Throughout the entire cycling process, the angular output θ(T) is continuously monitored and recorded at several temperature points: 25°C (ambient temperature), -40°C, 25°C, 85°C, and 25°C (return check). Based on these measurements, the zero temperature drift and sensitivity temperature drift are calculated.
Zero temperature drift： 
( Take the maximum value as the specification value)。
Sensitivity temperature drift： 
The acceptance criteria for T7000-F are: zero temperature drift ≤ 0.0005°/℃, and sensitivity temperature drift ≤ 50 ppm/℃. These specifications are derived from actual testing of each product, rather than theoretical calculations. Each sensor is equipped with a temperature compensation table ranging from -40℃ to 85℃ (at 5℃ intervals), which enables precise compensation through real-time interpolation during operation, ensuring measurement accuracy across the full temperature range.
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