Industrial Grade MEMS Tri Axis Accelerometer Sensor Digital Output 40g Range Inertial Measurement Sensor Ceramic Package

The AT-950 industrial grade MEMS tri-axis accelerometer adopts advanced silicon-based MEMS technology and a compact ceramic package design, featuring high stability, low noise, low temperature drift, wide measurement range, and excellent long-term reliability

  • Part No, :

    AT-950
  • Order(MOQ) :

    1
  • Product Description

Product Series and Parameters

Parameters MEMS Accelerometer Unit
Product code AT-950-40 AT-950-50  
Encapsulation CLCC14  
Dimension 6*6*2 mm
Axial X, Y, Z  
Range ±40 ±50 g
Scale nonlinearity <1000(X,Y), <5000(Z) <1000ppm(@20g);
>3000ppm(@50g)
ppm (IEEE Norm , of full scale)
Bandwidth 3db (adjustable) 200   200   Hz
Delayed <1.5 <1.5 ms
Zero bias (room temperature) ±1 (X,Y); ±1.5 (Z) ±1 (X,Y); ±1.5 (Z) mg(@room temperature)
Zero bias temperature drift <5 <5 mg
Zero-bias temperature hysteresis <1.5 <2 mg
Zero bias stability (1s, smooth @room temperature) 100 (X, Y), 150 (Z) 100 (X, Y), 150 (Z) ug
Zero bias stability (10s,  smooth @room temperature) 75 (X, Y), 100 (Z) 75 (X, Y), 100 (Z) ug
Zero bias stability (Allan) 20 (X, Y), 25 (Z) 25 (X, Y), 30 (Z) ug
Switch repeatability 1σ 50 (X, Y), 75 (Z) 50 (X, Y), 75 (Z) ug
Scale factor 12800±13 10240±10 Lsb/g(@room temeprature)
Scale temperature coefficient 100 100 ppm/°C
Residual error after scaled temperature compensation 100 100 ppm(second-order compensation)1σ
Start time <200 <200 ms
ODR (adjustable) 4K 4K Hz
Shock on power 3000 3000 g
Shock off power 3000 3000 g
Vibration rectification error (6grms) 1 (X, Y), 3 (Z) 1 (X, Y), 3 (Z) mg/grms
Operating temperature -45 ~ +85 -45 ~ +85 °C
Power voltage 3.3±10% 3.3±5% V
Current <600 <600 uA
Communication interface SPI SPI  

Production process


Product dimension

 

MEMS ACC

MEMS ACC


Application Scenarios

MEMS accelerometer application
The high-precision single-axis MEMS accelerometer is suitable for inertial measurement in medium-to-high accuracy IMU/INS systems, vehicle/rail motion sensing, and vibration/impact monitoring applications, featuring digital SPI output, wide measurement range options, high shock survivability, stable performance over temperature, compact structure, and easy integration/installation.
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MEMS accelerometer for UAV
UAV
MEMS accelerometer for robots
Robots
MEMS accelerometers are used in autonomous driving
Autonomous Driving

FAQ

Q1: How does zero bias stability affect navigation accuracy?
Engineering: Low zero-bias instability (≤10 μg/g) minimizes long-term drift, critical for INS/GNSS fusion systems. Commercial: Ensures position/velocity errors accumulate slower, enabling reliable autonomous vehicle operation over long distances.
 
Q2: What are the differences between MEMS and quartz accelerometers?
Engineering: MEMS uses micro-mechanical structures (low cost, small size), while quartz relies on flexure (higher stability, precision). Commercial: MEMS accelerometers like AT950 suit dynamic industrial applications (e.g., robotics), while quartz is better for ultra-precise static systems (e.g., scientific instruments).
 
Q3:How does temperature affect acceleration measurement accuracy?
Engineering: Integrated 16-bit temp sensor (TSF=134.66 LSB/°C) compensates acceleration data across -45°C to +85°C. Commercial: Critical for automotive powertrains and outdoor IoT, where temperature fluctuations would otherwise cause ±5°C errors without compensation.
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